The POU3500 technique presents dynamic temperature Charge of the process chamber cathode / electrode / anode and can be synchronized with any etch system.

30% of its peak energy use, providing our clients important reduction in running costs and greater reliability.

Along with the POU3500, you'll be able to attain unparalleled brings about etch general performance, chamber uptime, diminished price of possession and fab Place utilization – all while bettering your approach reliability.

at first Established in 1985, our business has developed into a regarded chief in furnishing temperature Manage techniques to the worldwide semiconductor marketplace.

This amazing process, supplying a small type aspect, low priced-of-possession and Dynamic Temperature Handle provided system and devices engineers a fresh Device to optimize their temperature sensitive processes.

The precision of your POU 3300 allows for independent control of the process fluid temperature to the wafer chuck in just +/- 0.one °C of established issue, along with the quick reaction time from the system lets for max wafer-to-wafer repeatability through the etch process.

The accuracy in the POU 3500 permits unbiased control of the process fluid temperature towards the wafer chuck inside of +/- 0.1 °C of established stage, as well as the rapid response time of your procedure enables for maximum wafer-to-wafer repeatability through the entire etch procedure.

With our unit strategically mounted around 6 toes within the chamber, we reach a way more accurate studying on the chuck temperature. This approach assures dependable temperature through the creation great deal, bringing about improved wafer-to-wafer CD uniformity.

big Footprint: Static models occupy significant Room in the fabrication Resource area, cutting down its efficiency.

LAUDA-Noah is Assembly these new issues and has integrated Electricity preserving engineering in systems which have been welcoming on the environment and also have a affordable to function.

The TEs' can switch straight from heating to cooling, or Noohapou visa-versa. they might turn on & off while while in the heating or cooling mode and will increase or minimize the amount of heating or cooling with out switching in any respect.

The POU3300 technique features dynamic temperature Charge of the procedure chamber cathode / electrode / anode and will be synchronized with any etch process.

the truth is legitimate Dynamic Temperature Control can only be reached when all 5 (5) of the subsequent procedure style and installation necessities are met:

(consequently, putting in a static unit beside chamber will not likely allow it to provide dynamic temperature Handle)

We recognize that wonderful products are sometimes the result of fantastic customer feedback and the appliance of progressive technologies. We attempt to make benefit for our shoppers by way of a method that lets The client influence our targets, aims, product developments and business tactics.